Structural characterization of 3e-Sic thin films grown on Si substrates

 
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PhD thesis (EN)

2008 (EN)
Μελέτη των δομικών ιδιοτήτων λεπτών υμενίων 3C-SiC ανεπτυγμένων σε υπόβαθρο Si
Structural characterization of 3e-Sic thin films grown on Si substrates

Ανδρεάδου, Αριάδνη Ι.

The study reported in present thesis is related to the structural characterization of 3e Sic thin films by means of transmission electron microscopy. The samples were grown on Si substrate by chemical varor deposition (CVD) and flash lapm annealing was performed afterwards. The goal was to grown good quality, defect free 3e-sic films who will be used as seeds for further growth. The structural defects were studied in order to determine the optinum growth and annealing conditions
Το θέμα της παρούσας διδακτορικής διατριβής είναι ο δομικός χαρακτηρισμός λεπτών υμενίων 3c-Sic, με ηλεκτρονική μικροσκοπία διέλευσης. Τα δείγματα αναπτύχθηκαν με τη μέθοδο της χημικής εναπόθεσης ατμών (CVD) και στη συνέχεια υπέστησαν ανόπτηση με στιγμιαία ακτινοβόληση λυχνιών Xe. Στόχος ήταν η βελτίωση της κρυσταλλικής ποίτητας των υμενίων ώστε να χρησιμοποιηθούν ως πυρήνες (Seeds) για επιπλέον ανάπτυξη Sic. Η μελέτη των σφαλμάτων δομής είχε ως στόχο τον προσδιορισμό των βέλτιστων συνθηκών ανόπτησης και ανάπτυξης

PhD Thesis / Διδακτορική Διατριβή
info:eu-repo/semantics/doctoralThesis

Thin films
Λεπτές ταινίες
Silicon carbide
Transmission electron microscopy
Ηλεκτρονική μικροσκοπία διέλευσης
Ανθρακοπυρίτιο

Αριστοτέλειο Πανεπιστήμιο Θεσσαλονίκης (EL)
Aristotle University of Thessaloniki (EN)

2008
2009-09-07T05:50:55Z


Αριστοτέλειο Πανεπιστήμιο Θεσσαλονίκης, Σχολή Θετικών Επιστημών, Τμήμα Φυσικής

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info:eu-repo/semantics/openAccess



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