Macroscopic and stochastic modeling approaches to pattern doubling by acid catalyzed cross-linking

 
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2010 (EN)
Macroscopic and stochastic modeling approaches to pattern doubling by acid catalyzed cross-linking (EN)

Fuhrmann, Andreas (EL)
Πάτσης, Γεώργιος (EL)
Fiebach, Andre (EN)

N/A (EN)

Pattern doubling by cross-linking of a spacer triggered by residual acid diffusion from a previously developed primary structure into the spacer is a possible option to create structure widths below the nominal resolution of the optical process. An advantage of such a process step would be the self-alignment to the primary structure, which would render a second exposure step unnecessary. Using macroscopic and stochastic modeling approaches, we demonstrate that it may be possible to control the width of the secondary structure created by cross-linking by the amount of quencher base added. (EN)

conferenceItem
poster

Διάχυση (EN)
Μακροσκοπικές προσεγγίσεις (EN)
Στοχαστικές προσεγγίσεις (EN)
Diffusion (EN)

ΤΕΙ Αθήνας (EL)
Technological Educational Institute of Athens (EN)

Advances in Resist Materials and Processing Technology XXVII (EN)

English

2010-02-21

DOI: http://dx.doi.org/10.1117/12.846491



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