Point-to-point resolution in x-ray microanalysis of thin coatings in the energy range 20-100keV

 
This item is provided by the institution :
Technological Educational Institute of Athens
Repository :
Ypatia - Institutional Repository
see the original item page
in the repository's web site and access all digital files if the item*
share




1991 (EN)
Point-to-point resolution in x-ray microanalysis of thin coatings in the energy range 20-100keV (EN)

Νασιοπούλου, Ανδρούλα Γ. (EL)
Βαλαμόντες, Ευάγγελος Σ. (EL)

N/A (EN)

The lateral extent of the X-ray signal in X-ray microanalysis of thin overlayers is calculated systematically, by using Monte Carlo simulations. Different primary beam energies in the range 20-100keV and different film thicknesses are considered. A Point-Spread-Function composed of two Gaussian curves is determined for each point and the Rayleigh criterion is used in order to calculate the corresponding point-to-point resolution. (EN)

journalArticle

Λεπτές ταινίες (EN)
Μικροανάλυση (EN)
Monte Carlo μέθοδοι (EN)
Microanalysis (EN)
Monte Carlo Methods (EN)
Ανάλυση με ακτίνες Χ (EN)
X ray analysis (EN)
Thin Films (EN)

ΤΕΙ Αθήνας (EL)
Technological Educational Institute of Athens (EN)

Institute of Physics Conference Series (EN)

English

1991


N/A (EN)



*Institutions are responsible for keeping their URLs functional (digital file, item page in repository site)