Electron-beam lithography simulation for EUV mask applications

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Technological Educational Institute of Athens
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2005 (EN)
Electron-beam lithography simulation for EUV mask applications (EN)

Πάτσης, Γεώργιος (EL)
Γλέζος, Νίκος (EL)

N/A (EN)

Extreme-ultraviolet-(EUV) mask fabrication using electron-beam lithography has to eliminate the proximity effect defects, for the accurate representation of the patterned features. One special characteristic of EUV masks is that they contain a multilayer stack of repeated Si/Mo thin layers. This has to be considered explicitly in the simulation of electron-beam energy dissipation calculation using Monte Carlo methods. In a first approximation to the problem of electron scattering in a multi-layer substrate, the continuous slowing down approximation utilizing the Rutherford differential cross section is used in order to describe the electron inelastic energy loss mechanism and determine the amount of deposited backscattered energy, in the resist film on top of the multi-layer substrate. Three-dimensional modeling is used and in this first attempt to describe the process, no secondary electron generation or other excitation processes are considered. The effect of the number of layers and their relative thickness in terms of incident electron energy is investigated. (EN)


Υπεριώδεις ακτίνες (EN)
Ulatraviolet rays (EN)
Electron beams (EN)
Semiconductors (EN)
Δέσμες ηλεκτρονίων (EN)
Ημιαγωγοί (EN)

ΤΕΙ Αθήνας (EL)
Technological Educational Institute of Athens (EN)

Journal of Physics: Conference Series (EN)



DOI: 10.1088/1742-6596/10/1/094

N/A (EN)

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