A miniaturized chemocapacitor system for the detection of volatile organic compounds

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2013 (EN)
A miniaturized chemocapacitor system for the detection of volatile organic compounds (EN)

Γουστουρίδης, Δημήτριος (EL)
Γκανέτσος, Θεόδωρος (EL)
Μποτσιάλας, Αθανάσιος Γ (EL)
Οικονόμου, Πέτρος (EL)
Ράπτης, Ιωάννης Α. (EL)

Σανοπούλου, Μερόπη (EL)
N/A (EN)

A miniaturized gas sensing system suitable for real life applications, consisting of an array of 8 polymer-coated capacitive sensors and low power read-out electronics is designed and realized. The chemocapacitor array is fabricated with standard microelectronics/micromachining processes allowing for the realization of planar InterDigitated Electrodes (IDEs) with 2 μm critical dimension. The read-out electronics sub-module consists of an analog multiplexer for the sequential measurement of the sensor array elements, a capacitance to 24-bit converter and a USB to I2C interface. The electronic sub-module developed, was evaluated against a standard capacitance meter and presents a noise of ∼0.2 fF and therefore capacitance signal (ΔC) of 0.6 fF (S/N = 3) is detectable. The compact module has been successfully applied in the detection of low concentrations of p-xylene and toluene, according to the international health standards, in the presence of humidity. (EN)


Volatile organic compounds (EN)
Πτητικές οργανικές ενώσεις (EN)
Chemocapacitor (EN)
Σύστημα ανίχνευσης υβριδικού αερίου (EN)
Hybrid gas sensing system (EN)
Interdigitated electrodes (EN)
Συμπλεκόμενα ηλεκτρόδια (EN)

ΤΕΙ Αθήνας (EL)
Technological Educational Institute of Athens (EN)

Sensors and Actuators B: Chemical (EN)




N/A (EN)

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