Characterization of light emitting silicon nanopillars produced by lithography and etching

 
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Journal part (EN)
Scientific article (EN)
1996 (EN)
Characterization of light emitting silicon nanopillars produced by lithography and etching (EN)
Travlos, A (EN)
Kennou, S (EN)
Ladas, S (EN)
Grigoropoulos, S (EN)
Nassiopoulos, AG (EN)
Papadimitriou, D (EN)
Silicon nanopillars were produced by using deep-UV lithography, fluorine based highly anisotropic silicon etching and further thinning by high temperature thermal or chemical oxidation and oxide removal. The obtained structures were fully characterized by scanning and transmission electron microscopy, electron diffraction, atomic force microscopy and X-ray photoelectron spectroscopy. It was verified that the obtained nanopillars by the above process are of perfect crystallinity, the bottom silicon surface on which they lie is very smooth and that minor surface contamination by carbon or oxygen is present on both the bottom silicon surface and the surface surrounding the nanopillars. The obtained luminescence peak is in the red-green spectral region. (EN)
journalArticle (EN)
Atomic force microscopy (EN)
Crystal impurities (EN)
Electron diffraction (EN)
Semiconductor device structures (EN)
Physics, Condensed Matter (EN)
Etching (EN)
Electron Diffraction (EN)
X Ray Photoelectron Spectroscopy (EN)
Surface structure (EN)
Luminescence of inorganic solids (EN)
Luminescence peak (EN)
Semiconducting silicon (EN)
Scanning electron microscopy (EN)
Fluorine-based highly anisotropic silicon etching (EN)
Lithography (EN)
Deep ultrahigh vacuum lithography (EN)
Atomic Force Microscopy (EN)
Chemistry, Physical (EN)
Physics, Applied (EN)
High Temperature (EN)
Transmission electron microscopy (EN)
Materials Science, Coatings & Films (EN)
X ray photoelectron spectroscopy (EN)
Red green spectral region (EN)
Transmission Electron Microscopy (EN)
Nanotechnology (EN)
National Technical University of Athens
Digital Library of National Technical University of Athens | Dspace@NTUA
Κεντρική Βιβλιοθήκη Ε.Μ.Π.
Ιδρυματικό Αποθετήριο
Δημοσιεύσεις μελών Δ.Ε.Π. σε περιοδικά
Applied Surface Science (EN)
English
1996 (EN)
http://hdl.handle.net/123456789/11809
0169-4332 (EN)
102 (EN)
377 (EN)
ISI:A1996VJ86100076 (EN)
10.1016/0169-4332(96)00081-5 (EN)
380 (EN)
ELSEVIER SCIENCE BV (EN)



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