Rehakova, A.Hotovy, J.Hotovy, I.Κομπίτσας, ΜιχάληςFasaki, I.Rehacek, V.Roubani-Kalantzopoulou, F.TiO2 thin films were prepared by DC reactive magnetron sputtering in a mixture of oxygen and argon on glass and oxidized silicon substrates. The effect of post-deposition annealing (300 degrees C. 500 degrees C and 700 degrees C for 8 h in air) on the structural and morphological properties of TiO2 thin films is presented. In addition, the effect of Pt surface modification (1, 3 and 5 nm) on hydrogen sensing was studied. XRD patterns have shown that in the range of annealing temperatures from 300 degrees C to 500 degrees C crystallization starts and the thin film structure changes from amorphous to polycrystalline (anatase phase). In the case of samples on glass substrate, optical transmittance spectra were recorded. TiO2 thin films were tested as sensors of hydrogen at concentrations 10,000-1000 ppm and operating temperatures within the 180-200 degrees C range. The samples with 1 nm and in particular with 3 nm of Pt on the surface responded to hydrogen fast and with high sensitivity.LAUSANNEAdobe PDF1103-1108https://hdl.handle.net/10442/1262510.1016/j.tsf.2009.08.0520040-6090engElsevier S.A.© 2009 Elsevier B.V. All rights reserved.© 2009 Elsevier B.V. All rights reserved.2nd International Symposium on Transparent Conducting Oxides, Crete, GREECE, Thin Solid Films, 2008-10-22 - 2008-10-26Metal modificationTiO2 thin filmsMaterials Science, Coatings & FilmsMaterials Science, MultidisciplinaryHydrogen sensingPhysics, Condensed MatterPhysics, AppliedEffects of post-deposition surface treatment on the optical, structural and hydrogen sensing properties of TiO2 thin filmsΆρθρο σε επιστημονικό περιοδικό2009-12-15Δημοσίευση σε περιοδικόPublication in journalΤεχνολογία μέσωνMedia TechnologyΦυσικήPhysical sciencesFrascati 42Επιστημονικό άρθροScientific articleΕθνικό Ίδρυμα Ερευνών (ΕΙΕ)Greek Aggregator OpenArchives.gr | National Documentation Centre (EKT)