Hybrid integration of microfabricated chemocapacitor arrays with miniaturized read-out electronics towards low-power gas sensing module

 
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2011 (EN)
Hybrid integration of microfabricated chemocapacitor arrays with miniaturized read-out electronics towards low-power gas sensing module (EN)

Πάτσης, Γεώργιος Π. (EL)
Μανώλη, Κυριακή (EL)
Γουστουρίδης, Δημήτριος (EL)
Οικονόμου, Πέτρος (EL)
Μποτσιάλας, Αθανάσιος Γ. (EL)

Σανοπούλου, Μερόπη (EL)
Βαλαμόντες, Ευάγγελος Σ. (EL)
Πανταζής, Νίκος Α. (EL)
Ράπτης, Ιωάννης Α. (EL)
N/A (EN)

A hybrid gas sensing module consisting of an array of 8 polymer coated capacitive sensors and low power read-out electronics is introduced. The chemocapacitor array is fabricated with standard microelectronics/micromachining processes allowing for the realization of planar InterDigitated Electrodes (IDEs). The read-out electronics sub-module consists of an analog multiplexer for the sequential measurement of the sensor array elements, a capacitance to 24-bit converter and a USB to I 2C interface. The compact hybrid module has been successfully applied in the detection of sub-100ppm concentrations of p-xylene and toluene. The responses to various humidity levels have been also evaluated. (EN)

conferenceItem
poster

Volatile organic compounds (EN)
Πτητικές οργανικές ενώσεις (EN)
Αίσθηση του φυσικού αερίου (EN)
Chemcapacitor (EN)
Polymer (EN)
Gas sensing (EN)
Πολυμερές (EN)

ΤΕΙ Αθήνας (EL)
Technological Educational Institute of Athens (EN)

25th Eurosensors Conference (EN)

English

2011

DOI: 10.1016/j.proeng.2011.12.275

Elsevier (EN)



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