Ultra-miniaturized monolithically integrated polymer coated Si optoelectronic cantilevers for gas sensing applications

 
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2009 (EN)
Ultra-miniaturized monolithically integrated polymer coated Si optoelectronic cantilevers for gas sensing applications (EN)

Μισιακός, Κωνσταντίνος (EL)
Κοντοπανάγος, Χαράλαμπος Φ. (EL)
Γουστουρίδης, Δημήτριος (EL)
Κιτσαρά, Μαρία (EL)
Ράπτης, Ιωάννης Α. (EL)

Βαλαμόντες, Ευάγγελος Σ. (EL)
N/A (EN)
Gerardino, Annamaria (IT)

The cantilever based devices relying on optical beam steering, even though sensitive as sensors, have rather limited penetration to the market. The obstacle that has prevented so far the wider spread of such devices is the inability to monolithically integrate the photonic components on the same die with the cantilever. In this work, a novel microsystem is presented comprising integrated Si light sources and detectors self aligned to suspended Si 3N4 cantilevers, acting as waveguides, all monolithically integrated in the same Si chip through conventional microelectronics processing. The cantilever is coated with a polymeric film that selectively absorbs analyte molecules from the environment causing a change in the film stress and commensurate cantilever's deflection which is monitored as change in the photocurrent. The PMMA coated device showed detection of VOCs, in a wide concentration range from few tens of ppm, limited only by the physicochemical properties and the chemical affinity of the polymer used. (EN)

conferenceItem
poster

Μονολιθικά ολοκληρωμένα κυκλώματα (EN)
Αισθητήρες φυσικού αερίου (EN)
Monolithic integrated circuits (EN)
Polymer films (EN)
Silicon (EN)
Πυρίτιο (EN)
Πολυμερές φιλμ (EN)
Gas sensors (EN)
Οργανικές ενώσεις (EN)
Organic compounds (EN)

ΤΕΙ Αθήνας (EL)
Technological Educational Institute of Athens (EN)

IEEE Sensors 2009 Conference - SENSORS 2009 (EN)

English

2009

DOI: 10.1109/ICSENS.2009.5398260

IEEE (EN)



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