Comparative study of AlN dielectric films’ electrical properties for MEMS capacitive switches

 
This item is provided by the institution :

Repository :
e-dulll repository
see the original item page
in the repository's web site and access all digital files if the item*
share



Semantic enrichment by EKT
Abstract (EN)
Conference item (EN)
Comparative study of AlN dielectric films’ electrical properties for MEMS capacitive switches
Georgakilas, A.
Konstantinidis, G.
Papaioannou, G.
Michalas, L.
Papandreou, E.
Stavrinidis, G.
Koutsoureli, M.
Adikimenakis, A.
Text (Abstract presentation)
Text
φυσικές επιστήμες
ηλεκτρονική
ηλεκτρική ενέργεια
ηλεκτρολογικό υλικό
Operational Programme, Education and Lifelong Learning, Ministry of Education and Lifelong Learning
e-dulll repository
English
2012
http://hdl.handle.net/10795/2986
http://repository.edulll.gr/2986
MICRO & NANO 12ABSTRACT



*Institutions are responsible for keeping their URLs functional (digital file, item page in repository site)