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Laser-based materials growth and microfabrication

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Laser-based materials growth and microfabrication
Βάϊνος, Νικόλαος A.
Ανακοίνωση σε συνέδριο
2000
The ablation of materials by intense laser pulses enables a range of direct materials processing methods. Pulsed laser deposition achieves even epitaxial growth of complex compounds or precisely tuned novel structures. The spatially selective ablation process results in direct materials microetching and microdeposition offering novel, low-cost alternative microfabrication tools.
NEW YORK
Φυσική (EL)
Μηχανική (Γενικά). Πολιτική μηχανική (Γενικά) (EL)
Επιστήμη (Γενικά) (EL)
Τεχνολογία (Γενικά) (EL)
Technology (General) (EN)
Engineering (General). Civil engineering (General) (EN)
Science (General) (EN)
Physics (EN)
Materials Science, Multidisciplinary
Engineering, Electrical & Electronic
Physics, Condensed Matter
Physics, Applied
English
IEEE
23rd International Semiconductor Conference (CAS 2000), SINAIA, ROMANIA, 2000 International Semiconductor Conference, Vols 1 and 2, CAS 2000 Proceedings, 2000-10-10 - 2000-10-14
© IEEE
© IEEE (EN)
National Hellenic Research Foundation (NHRF)
Helios - Repository of the National Hellenic Research Foundation (NHRF)



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