Analytical modelling of thermopile based flow sensor and verification with experimental results

 
This item is provided by the institution :
Technological Educational Institute of Athens
Repository :
Ypatia - Institutional Repository
see the original item page
in the repository's web site and access all digital files if the item*
share




2009 (EN)
Analytical modelling of thermopile based flow sensor and verification with experimental results (EN)

Πετρόπουλος, Αναστάσιος (EL)
Καλτσάς, Γρηγόριος (EL)
Lazić, Žarko (EN)
Djurić, Zoran (EN)
Randjelović, Danijela V. (EN)

Τ.Ε.Ι. Αθήνας. Σχολή Τεχνολογικών Εφαρμογών. Τμήμα Ηλεκτρονικών Μηχανικών Τ.Ε. (EL)
Popović, Mirjana (EN)

A novel, simple approach for analytical modelling of thermal flow sensors has been implemented. It is based on unification of results obtained using the already developed two-zone analytical model and theory of laminar fluid flow over uniformly heated plate. This model can be used in order to extract the main parameters for various geometrical configurations of thermal flow sensors. Presented analytical model was further verified by experimental results. Flow tests were performed using multipurpose MEMS flow sensors consisting of two thermopiles, with 30 p+Si/Al thermocouples each, and a “U” shaped p+Si heater. Thermally isolating membrane was formed of sputtered SiO2 and residual n-Si layer. Experimental evaluation was performed under various flow conditions and applied heating power values. The results showed excellent agreement with theoretical predictions. (EN)

journalArticle

Thermopile (EN)
Θερμοπύλες (EN)
Αισθητήρας ροής (EN)
Flow sensor (EN)

ΤΕΙ Αθήνας (EL)
Technological Educational Institute of Athens (EN)

Microelectronic Engineering (EN)

English

2009

doi:10.1016/j.mee.2008.12.004

Elsevier B.V. (EN)



*Institutions are responsible for keeping their URLs functional (digital file, item page in repository site)