Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
(EN)
In this paper, we used back-foil scanning X-ray microfluorescence (SXRF) and we examined the sensitivity of the technique for the analysis of very thin overlayers, where electron probe X-ray microanalysis (EPMA) reaches its detection limits. The lateral resolution of back-foil SXRF is also calculated for all the systems used. Both experimental results and Monte-Carlo calculations are used in this respect. Back-foil SXRF used in optimized experimental conditions, is found to be more sensitive than EPMA, especially in the case of very thin overlayers. The lateral resolution of back-foil SXRF is of the order of some micrometers. This is much better than the lateral resolution in conventional XRF and of the same order of magnitude as in EPMA.
(EN)
Electrical engineering
**N/A**-Τεχνολογία
Scanning electron microscopy
http://zbw.eu/stw/descriptor/18426-4
http://id.loc.gov/authorities/subjects/sh85049410
Σάρωση ηλεκτρονικής μικροσκοπίας
Τεχνολογία
Electron probe microanalysis
**N/A**-Ηλεκτρολογία Μηχανολογία
http://id.loc.gov/authorities/subjects/sh91002757
Ηλεκτρολογία Μηχανολογία
Μικροσκόπιο φθορισμού
Technology
Μικροανάλυση ανιχνευτή ηλεκτρονίων
http://id.loc.gov/authorities/subjects/sh85042233
http://id.loc.gov/authorities/subjects/sh85133147
Fluorescence microscopy
Elsevier
(EN)
http://www.elsevier.com
Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες
