Scanning X-ray microfluorescence in a SEM for the analysis of very thin overlayers

 
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2007 (EN)
Scanning X-ray microfluorescence in a SEM for the analysis of very thin overlayers (EN)

Σταθαράς, Ιωάννης Χ. (EL)
Βαλαμόντες, Ευάγγελος Σ. (EL)
Νομικός, Κωνσταντίνος Δ. (EL)

N/A (EN)

In this paper, we used back-foil scanning X-ray microfluorescence (SXRF) and we examined the sensitivity of the technique for the analysis of very thin overlayers, where electron probe X-ray microanalysis (EPMA) reaches its detection limits. The lateral resolution of back-foil SXRF is also calculated for all the systems used. Both experimental results and Monte-Carlo calculations are used in this respect. Back-foil SXRF used in optimized experimental conditions, is found to be more sensitive than EPMA, especially in the case of very thin overlayers. The lateral resolution of back-foil SXRF is of the order of some micrometers. This is much better than the lateral resolution in conventional XRF and of the same order of magnitude as in EPMA. (EN)

journalArticle

Electron probe microanalysis (EN)
Scanning electron microscopy (EN)
Μικροσκόπιο φθορισμού (EN)
Μικροανάλυση ανιχνευτή ηλεκτρονίων (EN)
Σάρωση ηλεκτρονικής μικροσκοπίας (EN)
Fluorescence microscopy (EN)

ΤΕΙ Αθήνας (EL)
Technological Educational Institute of Athens (EN)

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (EN)

English

2007-07

DOI: 10.1016/j.nimb.2007.03.089

Elsevier (EN)



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