7th International Conference on Electron Beam Technologies. Varna, Bulgaria. 2-5 June, 2003. Code 64318
(EN)
Back-foil scanning X-ray microfluorescence (SXRF), developed in a scanning electron microscope and applied for the analysis of very thin coatings is compared with electron probe X-ray microanalysis (EPMA). Both experimental results and Monte-Carlo calculations are used in this respect. The signal to background ratio as a function of the primary electron beam energy and angle of incidence, and for different film thicknesses is obtained for both techniques and a comparative study of sensitivity is made. Back-foil SXRF used in optimized experimental conditions, is found to be more sensitive than EPMA, especially in the case of very thin overlayers. The resolving power of back-foil SXRF is also calculated for the anode used by Monte-Carlo simulations.
(EN)
Electrical engineering
**N/A**-Τεχνολογία
Λεπτές ταινίες
Μικροανάλυση ακτίνων Χ
http://zbw.eu/stw/descriptor/18426-4
X-ray microanalysis
Τεχνολογία
http://id.loc.gov/authorities/subjects/sh85148737
Thin films
**N/A**-Ηλεκτρολογία Μηχανολογία
Ηλεκτρολογία Μηχανολογία
X-ray microfluorescence
Technology
http://id.loc.gov/authorities/subjects/sh85133147
Elsevier
(EN)
http://www.elsevier.com
Αναφορά Δημιουργού-Μη Εμπορική Χρήση-Όχι Παράγωγα Έργα 3.0 Ηνωμένες Πολιτείες
