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A reactive sputtering process model for symmetrical planar diode systems
This item is provided by the institution :
National Technical University of Athens
Repository :
Digital Library of National Technical University of Athens | Dspace@NTUA
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ΕΚΤ item type
Journal part
(EN)
Scientific article
(EN)
EKT year
1992
(EN)
EKT historical period
Title
A reactive sputtering process model for symmetrical planar diode systems (EN)
Creator
Tsiogas, CD (EN)
Avaritsiotis, JN (EN)
Description
A quantitative model for the reactive sputtering process in a symmetrical planar configuration is presented which takes specific system geometry into consideration. Scattering effects have been included using a Monte Carlo approach. The model allows for the calculation of the radial compositional distribution of the growing film as a function of the distance between the target and the condensation surface, further to the simulation of the well-known hysteresis effect and its consequences in the composition of the deposited film. One of the main features of the proposed model is that it offers the possibility of introducing a reactive gas profile across the reaction zone (instead of considering it to be constant), to account for the gettering action of both target and condensation surface at relatively high sputtering rates and short target-to-substrate separations. Calculated results concerning system stability have been found to be in good qualitative agreement with experimental results published in the literature. © 1992. (EN)
Type
journalArticle (EN)
Subject
Mathematical Statistics--Monte Carlo Methods (EN)
Films--Preparation (EN)
Reactive Sputtering (EN)
Process Model (EN)
Materials Science, Coatings & Films (EN)
Materials Science, Multidisciplinary (EN)
Semiconductor Diodes (EN)
Planar Diode Systems (EN)
Physics, Condensed Matter (EN)
Metals And Alloys (EN)
Physics, Applied (EN)
Provider
National Technical University of Athens
Repository / collection
Digital Library of National Technical University of Athens | Dspace@NTUA
Subcollections
Κεντρική Βιβλιοθήκη Ε.Μ.Π.
Ιδρυματικό Αποθετήριο
Δημοσιεύσεις μελών Δ.Ε.Π. σε περιοδικά
Journal
Thin Solid Films (EN)
Language
English
Issued
1992 (EN)
Identifier
http://hdl.handle.net/123456789/10620
1 (EN)
25 (EN)
10.1016/0040-6090(92)90004-U (EN)
17 (EN)
ISI:A1992HL63500003 (EN)
209 (EN)
0040-6090 (EN)
Publisher
ELSEVIER SCIENCE SA LAUSANNE (EN)
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